PR-PD2

·      Factory Interface (FI) with 1 load port for SMIF pod RSP-200 ·      Imaging optics o   Laser scan microscopy using 405nm semiconductor laser as light source. o   Particle detection using PMT. o   Particle observation mode with white LED light source and 2 million pixel CCD. 1-8x digital zoom available. o   Average inspection time for 132mm x 132mm area is ≤ 7min including load and unload. o   Dual optical path allowing mask scan on both chrome and glass side without flipping. ·      Minimum defect size scanning capability: o   0.1um and above for chrome blanks o   0.15um and above for glass side o   >90% capture repeatability at detection limit ·       Additional details available upon request