SIGMA fxP

User ID: TEST Password: TEST Date of Last PM Is System On-Line? Yes CE Mark Certified? Yes OEM Audit Available? No Can Produce Wafers AS IS? Yes Any Known Field Modifications? Yes All Cables Present? Yes GEM/SECS Interface Yes(SECS) SECS II Interface Yes Standard Network Communication Capability No

Machine Electricity Frequency 60 Hz Required Voltage 400V Need Transformer? Yes

Key Common Options  Included? Clean Room Manuals No Standard Manuals No Calibration Standards No

Transport module Configuration Front Monitor Trolley Rear Monitor Laptop TM Type GTM-OS Load Lock Vacuum / Model Turbo HiPace300 AUX – Left VX Aligner AUX – Right Single Gas Cool AUX – Center Blank TM RGA MV

PM1 Configuration ID Heat Platen HT Wafer Lift Ring Std Wafer Retainer HT RGA No

PM2 Configuration ID SE-LTX Coil RF PSU Paramount Platen RF PSU Paramount Platen SP – CrOx Cooling CDA Chiller TX N/A Chiller Fluid N/A Chiller Hose N/A Pins EC MFC Type MKS GE50A Pump Turbo / HiPace 700 H2_MOD No RGA No

PM3 Configuration Config Std Dep Platen RF PSU RFA-600A Platen Std Pins & BSR Std Cooling CDA Chiller TX N/A Chiller Fluid N/A Chiller Hose N/A Resistor Bank Yes[Std] Shutter Yes / Standard MFC Type MKS GE50A Pump Sicera Cryopump Throttle Valve No RGA No Target PSU 20kW Ascent Magnetron Moving Motor Variable HE Leak port Yes Lamp Bakeout No Hoist Rev B MM

PM4,5,6 Configuration Config Std Dep Platen RF PSU No Platen ITU Pins & BSR Std Cooling CDA Chiller TX N/A Chiller Fluid N/A Chiller Hose N/A Resistor Bank Yes[Std] Shutter No MFC Type MKS GE50A Pump Sicera Cryopump Throttle Valve No RGA No Target PSU 20kW Ascent Magnetron Standard Motor Variable HE Leak port Yes Lamp Bakeout Yes Hoist Rev B

Box 9 – Support Equipment Key Common Options Cyro Compressors Yes Manufacturer/Model CSW-61 Quantity 2ea Vacuum Pumps Yes Pump Type Dry

Manufacturer/Model Kasiyama MU100 Quantity 4ea